JPS623682Y2 - - Google Patents
Info
- Publication number
- JPS623682Y2 JPS623682Y2 JP1892081U JP1892081U JPS623682Y2 JP S623682 Y2 JPS623682 Y2 JP S623682Y2 JP 1892081 U JP1892081 U JP 1892081U JP 1892081 U JP1892081 U JP 1892081U JP S623682 Y2 JPS623682 Y2 JP S623682Y2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- resistance
- layer
- polyparaxylylene
- strain gauge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 claims description 24
- 239000010410 layer Substances 0.000 claims description 20
- 229920000052 poly(p-xylylene) Polymers 0.000 claims description 15
- -1 polyparaxylylene Polymers 0.000 claims description 14
- 239000011247 coating layer Substances 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 5
- 238000001771 vacuum deposition Methods 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 description 4
- URLKBWYHVLBVBO-UHFFFAOYSA-N Para-Xylene Chemical group CC1=CC=C(C)C=C1 URLKBWYHVLBVBO-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000002775 capsule Substances 0.000 description 1
- 239000000539 dimer Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Measurement Of Force In General (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1892081U JPS623682Y2 (en]) | 1981-02-13 | 1981-02-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1892081U JPS623682Y2 (en]) | 1981-02-13 | 1981-02-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57132207U JPS57132207U (en]) | 1982-08-18 |
| JPS623682Y2 true JPS623682Y2 (en]) | 1987-01-28 |
Family
ID=29816871
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1892081U Expired JPS623682Y2 (en]) | 1981-02-13 | 1981-02-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS623682Y2 (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003062782A (ja) * | 2001-06-14 | 2003-03-05 | Myotoku Ltd | 吸着パッド、及び、吸着パッドの製造方法 |
| JP5884921B2 (ja) * | 2012-11-30 | 2016-03-15 | 富士電機株式会社 | 圧力センサ装置および圧力センサ装置の製造方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014044180A (ja) * | 2012-08-29 | 2014-03-13 | Hitachi Automotive Systems Ltd | 歪みセンサモジュール |
-
1981
- 1981-02-13 JP JP1892081U patent/JPS623682Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003062782A (ja) * | 2001-06-14 | 2003-03-05 | Myotoku Ltd | 吸着パッド、及び、吸着パッドの製造方法 |
| JP5884921B2 (ja) * | 2012-11-30 | 2016-03-15 | 富士電機株式会社 | 圧力センサ装置および圧力センサ装置の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57132207U (en]) | 1982-08-18 |
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